ZORSIKA · English
The core content of this issue focuses on the design of the galvanometer + F-theta lens optical system, including multi-configuration modeling of a single-axis galvanometer and F-theta lens design. The F-theta lens can be optimized either by setting the field
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Core improvements of High-NA: Traditional EUV has a numerical aperture (NA) of 0.33, while High-NA EUV features an NA of 0.55.